Influence of the number of double layers on the damage threshold of Al 2O3/SiO2 and LaF3/MgF2 mirrors at 248 nm

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2714, Issue , 1996, Pages 499-510

  Eva, Eric ^a   Mann, Klaus R ^a   Schallenberg, Uwe B ^b   Kaiser, Norbert ^b   Henking, Rainer ^c   Ristau, Detlev ^c  

^a LASER LABORATORIUM GÖTTINGEN E V   (Germany)

^b FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

^c LASER ZENTRUM HANNOVER E V   (Germany)

Author keywords

Absorption; Boat evaporation; Conditioning; e beam evaporation; Excimer lasers; Laser damage; Oxide and fluoride HR coatings; Scatter defect density; Stack height; UV

Indexed keywords

ABSORPTION; BOATS; DEFECTS; ELECTRIC FIELDS; EVAPORATION; EXCIMER LASERS; GAS LASERS; KRYPTON; LASER DAMAGE; LASERS; MIRRORS; MOISTURE; OPTICAL MATERIALS; SILICON COMPOUNDS; VAPORS;

CONDITIONING; E-BEAM EVAPORATION; SCATTER DEFECT DENSITY; STACK HEIGHT; UV;

DEFECT DENSITY;

EID: 3943074821     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.240365     Document Type: Conference Paper

References (17)

1. 2 dielectric coatings for excimer lasers" , Thin Solid Films 260, 86-92 (1994)
2. K. Mann, H. Gerhardt: "Automated Damage Testing Facility for Excimer Laser Optics" ,in "Laser Induced Damage in Optical Materials: 1989" , NIST Spec. Publ. 801, 39 (1989)
3. K. Mann, H. Gerhardt: "Damage testing of optical components for high power excimer lasers" ,Proc. SPIE 1503, 176-184 (1991)
4. E. Welsch, H.G. Walther, R. Wolf, D. Schafer, L.W. Wieczorek: "Measurement of optical losses and damage thresholds of multilayer coatings" , Thin Solid Films 117, 87-94 (1984)
5. D.H. Gill, B.E. Newnam, J. McLeod: "Use of non-quarterwave design to increase the damage resistance of reflectors at 532 and 1064 nm" , NBS Spec. Pub. 509, 260-270 (1977)
6. N. Sahoo, K. Apparao: "Laser calorimeter for UV absorption measurement of dielectric thin films" ,Appl. Opt. 31, 6111 (1992)
7. "Test method for laser induced damage threshold of optical surfaces" , Part 1: 1-on-1 test, Part 2: S-on-1 test, ISO/DIS 11254
8. th Working draft on ISO/WI 13694, Oct. 1995
9. 2 thin films" , Laser Induced Damage in Optical Materials: 1990, H. Bennett, L. Chase, A. Guenther, B. Newnam, and M.J. Soileau, editors, Proc. SPIE 1441, 269 (1991)
10. 2 dielectric coatings for excimer lasers" ,Proc. SPIE 2428, 400-409 (1994)
11. E. Eva, K. Mann: "Calorimetric measurement of two-photon absorption and color-center formation in ultraviolet-window materials" , accepted for publ. in Appl. Phys. A, Sept. 1995
12. K. Mann, E. Eva, A. Hopfmüller: "Damage testing and characterization of dielectric coatings for high power excimer lasers" , Proc. of Int. Symp. on Interference Coatings, June 1994, Proc. SPIE 2253
13. "Test method for absorptance of optical laser components" ,ISO/DIS 11551, Feb. 1993
14. K. Ettrich, H. Blaschke, E. Welsch, P. Thomsen-Schmidt, D. Schafer: "UV-Laser Investigation of Dielectric Thin Films" , to be published in this issue (Proc. SPIE 2714)
15. E. Welsch: "Absorption Measurements" , in: Handbook of Optical Properties, Vol. I: Thin Films for Optical Coatings, R.E. Hummel, K.H. Guenther, Eds., CRC Press, 1995; and refererences therein
16. J. Kolbe, H. Müller, H. Schink, H. Welling, J. Ebert: "Laser induced damage thresholds of dielectric coatings at 193 nm and correlations to optical constants and process parameters", Proc. SPIE 1438 (1989)
17. M. Rahe, D. Ristau, H. Schmidt: "The effect of hydrogen concentration in conventional and IAD coatings on the absortion and laser-induced damage at 10.6 μm", Proc. SPIE 1848, 335-348 (1992)