High damage threshold Al2O3 SiO2 dielectric coatings for excimer lasers

Thin Solid Films

Volumn 260, Issue 1, 1995, Pages 86-92

  Kaiser, N ^a   Uhlig, H ^a   Schallenberg, U B ^a   Anton, B ^a   Kaiser, U ^b   Mann, K ^c   Eva, E ^c  

^a FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

^b FRIEDRICH SCHILLER UNIVERSITY JENA   (Germany)

^c LASER LABORATORIUM GÖTTINGEN E V   (Germany)

Author keywords

Aluminium oxide; Laser irradiation; Optical coatings; Silicon oxide

Indexed keywords

ABSORPTION MEASUREMENTS; ALUMINIUM OXIDE; COST EFFECTIVE OPTICS; DIELECTRIC COATINGS; PHOTOTHERMAL MICROSCOPY; ULTRALOW LOSS CONVENTIONAL ELECTRON BEAM EVAPORATION;

ABSORPTION SPECTROSCOPY; ALUMINA; ATOMIC FORCE MICROSCOPY; COATING TECHNIQUES; DIELECTRIC MATERIALS; ELECTRON BEAMS; EVAPORATION; EXCIMER LASERS; LASER BEAM EFFECTS; LIGHT ABSORPTION; MULTILAYERS; SILICA;

OPTICAL COATINGS;

EID: 0029309502     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/0040-6090(94)06469-5     Document Type: Article

References (35)

1. Highly damage-resistant reflectors for 248 nm formed by flouride multilayers
2. Damage thresholds of flouride multilayers at 355 nm
3. 2, and LiF films
4. Investigation on thin fluoride films for optical applications by surface analytical methods and electron microscopy
5. Structure of thin fluoride films deposited on amorphous substrates
6. 2 films by spectroscopic ellipsometry
7. Ion beam processing of optical thin films
8. Laser induced damage thresholds of dielectric coatings at 193 nm and correlations to optical constants and process parameters
9. 2 coatings for the ultraviolet
10. Automated damage testing facility for excimer laser optics
11. Damage testing of optical components for high power excimer lasers
12. Monitoring and shaping of excimer laser beam profiles
13. Set-up of a damage testing facility for excimer laser
14. Test method for absorptance of optical laser components
15. Time and frequency resolved photothermal investigation of optical thin film damage
16. Laser-induced damage threshold and absorption measurements in rare-gas-halide excimer laser components
17. Micrometer resolved photothermal displacement inspection of optical coatings
18. 2 dielectric mirror coatings for 248 nm
19. Structural influences of the laser damage thresholds of oxide coatings
20. Model for laser damage dependence on thin-film morphology
21. The role of defects in laser damage of multilayer coatings
22. Pulsed laser damage in thin film coatings: fluorides and oxides
23. The role of thermal conductivity in the pulsed laser damage sensitivity of optical thin films
24. Thermal conductivity of dielectric thin films
25. Thermal conductivity of thin films: Measurement and microstructural effects
26. Thermal transport properties of optical thin films
27. Contamination of surfaces prior to optical coating observed by in-situ total internal refelction microscopy
28. 2 thin films induced by the evaporation boat
29. Electrostatic reduction of particulates for laser resistant Hafnia coatings
30. Electronic and atomic structure of amorphous carbon
31. Graded reflectance mirror design with unconventional profile for excimer laser