Laser conditioning and electronic defects of HfO2 and SiO2 thin films

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 1441, Issue , 1991, Pages 269-282

  Kozlowski, M R ^a   Staggs, M ^a   Rainer, F ^a   Stathis, J H ^a  

^a Biology and Biotechnology Research   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRONIC PROPERTIES; HAFNIUM COMPOUNDS--DEFECTS; LASER BEAMS--EFFECTS;

LASER CONDITIONING; LASER INDUCED DAMAGE; PARAMAGNETIC ELECTRONIC DEFECTS;

SILICA;

EID: 0025813785     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (24)