Molecular simulation strategy for mechanical modeling of amorphous/porous low-dielectric constant materials

Applied Physics Letters

Volumn 92, Issue 6, 2008, Pages

  Yuan, Cadmus A ^a,d   Van Der Sluis, Olaf ^a,c   Zhang, G Q ^a,b   Ernst, Leo J ^a   Van Driel, Willem D ^b   Flower, Amy E ^c,e   Van Silfhout, Richard B R ^c  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b NXP SEMICONDUCTORS   (Netherlands)

^c PHILIPS RESEARCH LABORATORIES   (Netherlands)

^d Philips Applied Technologies ^*  (Netherlands)

^e GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; COMPUTER SIMULATION; DIELECTRIC MATERIALS; PERMITTIVITY;

MECHANICAL MODELING; POROUS MOLECULAR CONNECTION NETWORK GENERATION ALGORITHM;

MOLECULAR DYNAMICS;

EID: 39349098784     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2832639     Document Type: Article

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