Reliability issues in RF-MEMS switches submitted to cycling and ESD test

IEEE International Reliability Physics Symposium Proceedings

Volumn , Issue , 2006, Pages 410-415

  Tazzoli, A ^a   Peretti, V ^a   Gaddi, R ^b   Gnudi, A ^b   Zanoni, E ^a   Meneghesso, G ^a  

^a UNIVERSITY OF PADOVA   (Italy)

^b UNIVERSITY OF BOLOGNA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

MECHANICAL MOVEMENT; RELIABILITY ISSUES; RF-MEMS SWITCHES;

DYNAMIC RESPONSE; ELECTRIC POTENTIAL; ELECTRIC SWITCHES; RELIABILITY; SOLID STATE DEVICES;

MICROELECTROMECHANICAL DEVICES;

EID: 34250745222     PISSN: 15417026     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/RELPHY.2006.251253     Document Type: Conference Paper

References (8)

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7. J. A. Walraven, "Failure Mechanism in MEMS", ITC 2003, pp. 828-833.
8. A. Amerasekera, C. Duwury, 2nd Ed., John WILEY and Sons, 2002, pp. 47-57.