Development of a miniature air-bearing stage with a moving-magnet linear motor

International Journal of Precision Engineering and Manufacturing

Volumn 9, Issue 1, 2008, Pages 19-24

  Ro, Seung Kook ^a   Park, Jong Kweon ^a  

^a Korea Institute of Machine and Materials   (South Korea)

Author keywords

Magnetic preload; Micromachining tool; Miniature air bearing stage; Slotless linear motor

Indexed keywords

EID: 38949113983     PISSN: 12298557     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (17)

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