Linear air bearing stage with actively controllable magnetic preload

Proceedings of the 6th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2006

Volumn 1, Issue , 2006, Pages 301-304

  Ro, Seung Kook ^a   Kim, Soo Hyun ^b   Park, Chun Hong ^a  

^a Korea Institute of Machine and Materials   (South Korea)

^b Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; BEARINGS (MACHINE PARTS); ERRORS; INVERSE PROBLEMS; LINEAR MOTORS; PRECISION ENGINEERING;

ACTIVE COMPENSATION; AEROSTATIC BEARINGS; AIR BEARING STAGES; INVERSE METHODS; LINEAR MOTION STAGES; LINEAR STAGES; MAGNETIC FORCE; VERTICAL MOTIONS;

MAGNETIC ACTUATORS;

EID: 84908287012     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)

1. Slocum, A. Badaran, M., Cortesi, R. and Hart, A. J. 2003, "Linear motion carriage with aerostatic bearings preloaded inclined iron core linear electric motor", Precision Engineering, Vol. 27, pp. 382-394.
2. Yamaguchi, J., Sato K., Aoyama H., Shimokobe, A., 1991, "Measurement and Control of Straight Motion Accuracy Using Liquid Surface for Absolute Reference", J. of Japanese Society of Prec. Eng., Vol. 57, No. 3, pp. 128-133