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Volumn 44, Issue 3, 2008, Pages 186-187

ZnO transparent thin-film transistors with HfO2/Ta 2O5 stacking gate dielectrics

Author keywords

[No Author keywords available]

Indexed keywords

GATE DIELECTRICS; HAFNIUM COMPOUNDS; TANTALUM COMPOUNDS; ZINC OXIDE;

EID: 38849200992     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:20083215     Document Type: Article
Times cited : (11)

References (5)
  • 1
    • 33645683083 scopus 로고    scopus 로고
    • Effects of electrical bias stress on the performance of ZnO-based TFTs fabricated by RF magnetron sputtering
    • 0013-4651
    • Navamathavan, R., Yang, E.J., Lim, J.H., Hwang, D.K., Oh, J.Y., Yang, J.H., Jang, J.H., and Park, S.J.: ' Effects of electrical bias stress on the performance of ZnO-based TFTs fabricated by RF magnetron sputtering ', J. Electrochem. Soc., 2006, 153, (5), p. pp. G385-G388 0013-4651
    • (2006) J. Electrochem. Soc. , vol.153 , Issue.5
    • Navamathavan, R.1    Yang, E.J.2    Lim, J.H.3    Hwang, D.K.4    Oh, J.Y.5    Yang, J.H.6    Jang, J.H.7    Park, S.J.8
  • 2
    • 33645542322 scopus 로고    scopus 로고
    • High-performance ZnO thin-flm transistors on gate dielectrics grown by atomic layer deposition
    • 10.1063/1.2188379 0003-6951
    • Carcia, P.F., McLean, R.S., and Reilly, M.H.: ' High-performance ZnO thin-flm transistors on gate dielectrics grown by atomic layer deposition ', Appl. Phys. Lett., 2006, 88, p. 123509 10.1063/1.2188379 0003-6951
    • (2006) Appl. Phys. Lett. , vol.88 , pp. 123509
    • Carcia, P.F.1    McLean, R.S.2    Reilly, M.H.3
  • 3
    • 0035872897 scopus 로고    scopus 로고
    • High-K gate dielectrics: Current status and materials properties considerations
    • 10.1063/1.1361065 0021-8979
    • Wilk, G.D., Wallace, R.M., and Anthony, J.M.: ' High-K gate dielectrics: current status and materials properties considerations ', J. Appl. Phys., 2001, 89, (10), p. 5243-5275 10.1063/1.1361065 0021-8979
    • (2001) J. Appl. Phys. , vol.89 , Issue.10 , pp. 5243-5275
    • Wilk, G.D.1    Wallace, R.M.2    Anthony, J.M.3
  • 4
    • 0036648984 scopus 로고    scopus 로고
    • Thickness-dependent microstructural and electrochromic properties of sputter-deposited Ni oxide films
    • 10.1116/1.1487871
    • Ahn, K.S., Nah, Y.C., and Sung, Y.E.: ' Thickness-dependent microstructural and electrochromic properties of sputter-deposited Ni oxide films, ', J. Vac. Sci. Technol. A, 2002, 20, (4), p. 1468-1474 10.1116/1.1487871
    • (2002) J. Vac. Sci. Technol. A , vol.20 , Issue.4 , pp. 1468-1474
    • Ahn, K.S.1    Nah, Y.C.2    Sung, Y.E.3
  • 5
    • 27944469464 scopus 로고    scopus 로고
    • Fabrication of Au nanowires on hydrogen silsesquioxane by nanoimprint transfer
    • 10.1088/0957-4484/16/12/031 0957-4484
    • Chen, H.J.H., Liu, J.F., Hsu, Y.J., Syu, J.C.C., and Huang, F.S.: ' Fabrication of Au nanowires on hydrogen silsesquioxane by nanoimprint transfer ', Nanotechnology, 2005, 16, p. 2913-2918 10.1088/0957-4484/16/12/031 0957-4484
    • (2005) Nanotechnology , vol.16 , pp. 2913-2918
    • Chen, H.J.H.1    Liu, J.F.2    Hsu, Y.J.3    Syu, J.C.C.4    Huang, F.S.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.