The fabrication of thin GaAs cantilever beams for power sensor microsystem using RIE

Vacuum

Volumn 47, Issue 10, 1996, Pages 1215-1217

  Hascik S ^a   Lalinsky T ^a   Kuzmik J ^a   Porges, M ^a   Mozolova Z ^a  

^a INSTITUTE OF ELECTRICAL ENGINEERING   (Slovakia)

Author keywords

[No Author keywords available]

Indexed keywords

ARSENIC; EXPERIMENTS; FABRICATION; GALLIUM; MICROMACHINING; MULTILAYERS; SENSORS; TECHNOLOGY;

GAAS CANTILEVER BEAMS; POWER SENSOR MICROSYSTEM;

COMPOSITE MICROMECHANICS;

EID: 0030259348     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0042-207X(96)00129-7     Document Type: Article

References (4)

1. Senzor Technology and Devices, Ljubisa Ristic (Ed.). Artech House, Inc., 1994.
2. T Lalinský, J Kuzmík, M Porges, Š Haščík, Ž Mozolová and L Grňo, Electr Lett, 31, 1914 (1995).
3. L Grňo, IEEE Transactions on Instrumentation and Measurement, 44, 377 (1994).
4. Š Haščík, A Horniaková and J Huran, Vacuum, 45, 915 (1994).