Growth of highly (1 0 0)-oriented Zr-rich PZT thin films on Pt/Ti/SiO2/Si substrates by a simple sol-gel process

Journal of Crystal Growth

Volumn 220, Issue 1-2, 2000, Pages 82-87

  Fu, Xiaorong ^a   Li, Jinhua ^b   Song, Zhitang ^a   Lin, Chenglu ^a  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

^b CHANGZHOU UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; COERCIVE FORCE; FERROELECTRICITY; LEAD COMPOUNDS; PYROELECTRICITY; RANDOM PROCESSES; RAPID THERMAL ANNEALING; SOL-GELS; SUBSTRATES; THIN FILMS; X RAY CRYSTALLOGRAPHY;

FULL WIDTH AT HALF MAXIMUM (FWHM); LEAD ZIRCONATE TITANATE THIN FILMS;

DIELECTRIC FILMS;

EID: 0034322530     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(00)00824-1     Document Type: Article

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