Three-dimensional high-aspect-ratio recording in resist

Journal of Non-Crystalline Solids

Volumn 354, Issue 12-13, 2008, Pages 1194-1197

  Kondo, Toshiaki ^a,b   Juodkazis, Saulius ^a,b   Mizeikis, Vygantas ^a,b   Misawa, Hiroaki ^a,b  

^a HOKKAIDO UNIVERSITY   (Japan)

^b JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

Author keywords

Mechanical, stress relaxation; Photonic bandgap; Strength; Structural relaxation

Indexed keywords

DRAINAGE; HYDROPHOBICITY; STRESS RELAXATION; STRUCTURAL RELAXATION; THREE DIMENSIONAL;

CAPILLARY FORCE; DRAINAGE FORCE; FEATURE SIZES; WET PROCESSING; WOODPILE STRUCTURE;

PHOTONIC BAND GAP;

EID: 38649111391     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jnoncrysol.2006.11.048     Document Type: Article

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