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Volumn 516, Issue 7, 2008, Pages 1405-1409
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Surface treatment of polycarbonate and polyethersulphone for SiNx thin film deposition
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Author keywords
Adhesion; Plasma processing and deposition; Surface structure
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Indexed keywords
ADHESION;
POLYCARBONATES;
POLYETHERS;
SILICON NITRIDE;
SURFACE STRUCTURE;
SURFACE TREATMENT;
X RAY PHOTOELECTRON SPECTROSCOPY;
PLASMA TREATMENT;
POLYETHERSULPHONES;
THIN FILM DEPOSITION;
THIN FILMS;
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EID: 38649107419
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/j.tsf.2007.07.176 Document Type: Article |
Times cited : (19)
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References (14)
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