Self-organized nanoscale multilayer growth during the deposition of hyperthermal species

Reviews on Advanced Materials Science

Volumn 15, Issue 3, 2007, Pages 241-246

  Zutz, Hayo ^a   Gerhards, Inga ^a   Ronning, Carsten ^a   Hofsäss, Hans ^a   Seibt, Michael ^a   Wu, Wan Yu ^b   Ting, Jyh Ming ^b  

^a UNIVERSITY OF GÖTTINGEN   (Germany)

^b NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS CARBON; CRYSTALLINE MATERIALS; DEPOSITION; MAGNETRON SPUTTERING;

CRYSTALLINE PARTICLES; HYPERTHERMAL SPECIES; MULTILAYER FORMATION; NANOSCALE MULTILAYER;

MULTILAYERS;

EID: 38549166788     PISSN: 16065131     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

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