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Japanese Journal of Applied Physics

Volumn 47, Issue 1, 2008, Pages 226-230

Argon plasma beam scanning processes on polyimide films for liquid crystal alignment

(5) Lee, Chin Yang a Liu, Yu Lien a Wu, Kuen Yi b Chen, Ming Yu b Hwang, Jenn Chang b

a INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE (Taiwan)

b NATIONAL TSING HUA UNIVERSITY (Taiwan)

Author keywords

Liquid crystal alignment; Plasma beam; Polyimide

Indexed keywords

ARGON; ATOMIC FORCE MICROSCOPY; BEAM PLASMA INTERACTIONS; POLYIMIDES; POLYMER FILMS; TIN OXIDES;

ARGON PLASMA BEAM SCANNING; INDIUM TIN OXIDE GLASSES; X-RAY PHOTOEMISSION SPECTROSCOPY;

LIQUID CRYSTAL DISPLAYS;

EID: 38549146365 PISSN: 00214922 EISSN: 13474065 Source Type: Journal
DOI: 10.1143/JJAP.47.226 Document Type: Article

Times cited : (45)

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