Mechanism of flexural resonance frequency shift of a piezoelectric microcantilever sensor during humidity detection

Applied Physics Letters

Volumn 92, Issue 18, 2008, Pages 74-

  Zhu, Qing ^a   Shih, Wan Y ^b   Shih, Wei Heng ^a  

^a Drexel University   (United States)

^b DREXEL UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC MODULI; ELECTRIC FIELD EFFECTS; PERMITTIVITY; POLARIZATION; RESONANCE; SWITCHING; ATMOSPHERIC HUMIDITY; PIEZOELECTRICITY; SENSORS;

FLEXURAL RESONANCE FREQUENCY; PIEZOELECTRIC MICROCANTILEVER SENSOR (PEMS); HUMIDITY DETECTION;

PIEZOELECTRIC DEVICES; NATURAL FREQUENCIES;

EID: 38549117281     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2921050     Document Type: Article

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