Properties of ITO films deposited on plastic substrate by RF superimposed DC magnetron sputtering method

Solid State Phenomena

Volumn 124-126, Issue PART 1, 2007, Pages 367-370

  Kim, Do Geun ^a   Lee, Sunghun ^a   Park, Mi Rang ^a,b   Jeong, Yujeong ^a   Lee, Gun Hwan ^a   Song, Pung Keun ^b  

^a Korea Institute of Machine and Materials   (South Korea)

^b Pusan National University   (South Korea)

Author keywords

Electrical property; Flexible display; ITO films; Magnetron sputtering; Residual stress

Indexed keywords

ELECTRIC POWER SYSTEMS; HEATING; MAGNETRON SPUTTERING; RESIDUAL STRESSES; TIN COMPOUNDS; X RAY DIFFRACTION ANALYSIS;

DC POWER SYSTEMS; FLEXIBLE DISPLAY;

OXIDE FILMS;

EID: 38549087567     PISSN: 10120394     EISSN: None     Source Type: Book Series    
DOI: 10.4028/3-908451-31-0.367     Document Type: Conference Paper

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