PMMA and polystyrene films modification under ion implantation studied by spectroscopic ellipsometry

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5401, Issue , 2004, Pages 129-135

  Leontyev, A V ^a   Kovalev, V I ^b   Khomich, A V ^b   Komarov, F F ^a   Grigoryev, V V ^a   Kamishan, A S ^a  

^a BELARUSIAN STATE UNIVERSITY   (Belarus)

^b INST OF RADIO ENG AND ELECTRONICS   (Russian Federation)

Author keywords

Extinction coefficient; Ion implantation; Optical waveguide; Refractive index; Spectroscopic ellipsometry; Thin polymer films

Indexed keywords

ELECTRIC CONDUCTIVITY; ELLIPSOMETRY; INTEGRATED OPTICS; ION IMPLANTATION; MONOCHROMATORS; OPTICAL WAVEGUIDES; OPTOELECTRONIC DEVICES; POLYMETHYL METHACRYLATES; POLYSTYRENES; REFRACTIVE INDEX; SPECTROSCOPIC ANALYSIS; SPIN COATING; SUBSTRATES; SURFACE TREATMENT; WETTING;

COLLIMATING MIRRORS; EXTINCTION COEFFICIENT; SPECTROSCOPIC ELLIPSOMETRY; THIN POLYMER FILMS;

SEMICONDUCTING FILMS;

EID: 3843148377     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.557303     Document Type: Conference Paper

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