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Volumn 5377, Issue PART 2, 2004, Pages 1297-1304
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Diffraction analysis of customized illumination technique
a a a a a |
Author keywords
Customized illumination; Diffraction domain analysis; Illumination optimization
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Indexed keywords
ABERRATIONS;
DYNAMIC RANDOM ACCESS STORAGE;
FOURIER TRANSFORMS;
LITHOGRAPHY;
PHASE MODULATION;
SPECTRUM ANALYSIS;
CUSTOMIZED ILLUMINATION;
DIFFRACTION DOMAIN ANALYSIS;
ILLUMINATION OPTIMIZATION;
IMAGING PROPERTY;
ELECTROMAGNETIC WAVE DIFFRACTION;
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EID: 3843103531
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.536357 Document Type: Conference Paper |
Times cited : (5)
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References (4)
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