Non-contact thermal conductivity measurements of P-doped and N-doped gold covered natural and isotopically-pure silicon and their oxides

Proceedings of the 5th International Conference on Thermal and Mechanical Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2004

Volumn , Issue , 2004, Pages 269-276

  Burzo, Mihai G ^a   Komarov, Pavel L ^a   Raad, Peter E ^a  

^a Southern Methodist University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON MICROSCOPES; ELECTRONICS INDUSTRY; EPITAXIAL GROWTH; GOLD; INTEGRATED CIRCUITS; NANOTECHNOLOGY; OXIDES; RESEARCH AND DEVELOPMENT MANAGEMENT; SEMICONDUCTOR DOPING; THERMAL CONDUCTIVITY;

ELECTRO-THERMAL INTERACTIONS; EPITAXIAL LAYERS; INTERFACE RESISTANCE; TRANSIENT THERMO-REFLECTANCE (TTR) METHOD;

SEMICONDUCTING SILICON;

EID: 3843098215     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (15)

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