|
Volumn 5374, Issue PART 1, 2004, Pages 512-520
|
LEEPL production tool: EBPrinter LEEPL-3000
|
Author keywords
[No Author keywords available]
|
Indexed keywords
DEFLECTION (STRUCTURES);
ELECTRON BEAMS;
ERROR CORRECTION;
LIGHT SCATTERING;
OPTICAL RESOLVING POWER;
CRITICAL DIMENSION (CD);
OPTICAL PROXIMITY CORRECTION (OPC);
PROJECTION EXPOSURE WITH VARIABLE AXIS IMMERSION LENSES (PREVAIL);
PHOTOLITHOGRAPHY;
|
EID: 3843094857
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.535109 Document Type: Conference Paper |
Times cited : (4)
|
References (10)
|