-
1
-
-
0029212173
-
Copper metallization for ULSI and beyond
-
S P Murarka S W Hymes 1995 Copper metallization for ULSI and beyond Cr Rev Sol State 20 87
-
(1995)
Cr Rev Sol State
, vol.20
, pp. 87
-
-
Murarka, S.P.1
Hymes, S.W.2
-
2
-
-
0012438720
-
Progress in copper: A look ahead
-
P Singer 2002 Progress in copper: a look ahead Semiconductor Int 25 46
-
(2002)
Semiconductor Int
, vol.25
, pp. 46
-
-
Singer, P.1
-
3
-
-
33746257824
-
Reference materials - General and statistical principles for certification
-
ISO
-
ISO (2006) Reference materials - general and statistical principles for certification. ISO Guide 35
-
(2006)
ISO Guide
, vol.35
-
-
-
4
-
-
38349095709
-
Standard practise for testing homogeneity of materials for development of reference material
-
ASTM
-
ASTM (1990) Standard practise for testing homogeneity of materials for development of reference material. ASTM E 826
-
(1990)
ASTM E
, vol.826
-
-
-
8
-
-
4644274009
-
Role of matrix material in the characterization of high-purity copper by flame and graphite furnace AAS
-
S A Kumar M B Sanglikar M S Shaikh M Sudersanan 2004 Role of matrix material in the characterization of high-purity copper by flame and graphite furnace AAS Indian J Chem Techn 11 170
-
(2004)
Indian J Chem Techn
, vol.11
, pp. 170
-
-
Kumar, S.A.1
Sanglikar, M.B.2
Shaikh, M.S.3
Sudersanan, M.4
-
9
-
-
0003788724
-
-
Wiley-VCH Weinheim New York Chicester Toronto Brisbane Singapore
-
B Welz 1997 Atomabsorptionsspektrometrie Wiley-VCH Weinheim New York Chicester Toronto Brisbane Singapore
-
(1997)
Atomabsorptionsspektrometrie
-
-
Welz, B.1
-
10
-
-
0344820975
-
Analysis of impurities in high-purity copper by zeeman graphite furnace AAS
-
E Milella E Sentimenti G Mazzetto 1993 Analysis of impurities in high-purity copper by zeeman graphite furnace AAS At Spectrosc 14 1
-
(1993)
At Spectrosc
, vol.14
, pp. 1
-
-
Milella, E.1
Sentimenti, E.2
Mazzetto, G.3
-
11
-
-
38349107477
-
-
E DIN 32645:2006-09, DIN Deutsches Institut für Normung e.V.
-
E DIN 32645:2006-09, DIN Deutsches Institut für Normung e.V.
-
-
-
-
12
-
-
38349143520
-
Elementverunreinigungen in konzentrierten Kupferlösungen bestimmen
-
Nehm R (2005) Elementverunreinigungen in konzentrierten Kupferlösungen bestimmen. Labor Praxis Juli/August:54
-
(2005)
Labor Praxis
, vol.JULI-AUGUST
, pp. 54
-
-
Nehm, R.1
-
13
-
-
0031117291
-
Trace analysis of selected high-purity metals using high-resolution inductively coupled plasma mass spectrometry and inductively coupled plasma optical emission spectrometry
-
R Matschat M Czerwensky 1997 Trace analysis of selected high-purity metals using high-resolution inductively coupled plasma mass spectrometry and inductively coupled plasma optical emission spectrometry Phys Stat Sol (a) 160 567
-
(1997)
Phys Stat Sol (A)
, vol.160
, pp. 567
-
-
Matschat, R.1
Czerwensky, M.2
-
14
-
-
0001115146
-
Investigations concerning the analysis of high-purity metals (Cd, Cu, Ga and Zn) by high resolution inductively coupled plasma mass spectrometry
-
R Matschat M Czerwensky M Hamester S Pattberg 1997 Investigations concerning the analysis of high-purity metals (Cd, Cu, Ga and Zn) by high resolution inductively coupled plasma mass spectrometry Fresen J Anal Chem 359 418
-
(1997)
Fresen J Anal Chem
, vol.359
, pp. 418
-
-
Matschat, R.1
Czerwensky, M.2
Hamester, M.3
Pattberg, S.4
-
15
-
-
0032594236
-
Quality assurance of arsenic, lead, tin and zinc in copper alloys using axial inductively coupled plasma time-of-flight mass spectrometry (ICP-TOF-MS)
-
H Emteborg X Tian FC Adams 1999 Quality assurance of arsenic, lead, tin and zinc in copper alloys using axial inductively coupled plasma time-of-flight mass spectrometry (ICP-TOF-MS) J Anal At Spectrom 14 1567
-
(1999)
J Anal at Spectrom
, vol.14
, pp. 1567
-
-
Emteborg, H.1
Tian, X.2
Adams, F.C.3
-
16
-
-
0000801861
-
Determination of trace impurities in high purity copper using sector-field ICP-MS: Continuous nebulization, flow injection analysis and laser ablation
-
S Pattberg R Matschat 1999 Determination of trace impurities in high purity copper using sector-field ICP-MS: continuous nebulization, flow injection analysis and laser ablation Fresen J Anal Chem 364 410
-
(1999)
Fresen J Anal Chem
, vol.364
, pp. 410
-
-
Pattberg, S.1
Matschat, R.2
-
20
-
-
0036535436
-
RBS, SY-XRF, INAA and ICP-IDMS of antimony implanted in silicon - A multi-method approach to characterize and certify a reference material
-
K H Ecker U Wätjen A Berger L Persson W Pritzkow M Radtke H Riesemeier 2002 RBS, SY-XRF, INAA and ICP-IDMS of antimony implanted in silicon - a multi-method approach to characterize and certify a reference material Nucl Instrum Methods 188 120
-
(2002)
Nucl Instrum Methods
, vol.188
, pp. 120
-
-
Ecker, K.H.1
Wätjen, U.2
Berger, A.3
Persson, L.4
Pritzkow, W.5
Radtke, M.6
Riesemeier, H.7
-
22
-
-
0037237792
-
The X-ray-fluorescence facility at ANKA, Karlsruhe: Minimum detection limits and micro probe capabilities
-
R Simon G Buth M Hagelstein 2003 The X-ray-fluorescence facility at ANKA, Karlsruhe: minimum detection limits and micro probe capabilities Nucl Instrum Methods 199 554
-
(2003)
Nucl Instrum Methods
, vol.199
, pp. 554
-
-
Simon, R.1
Buth, G.2
Hagelstein, M.3
-
23
-
-
0036347218
-
Analysis of Copper - Possibilities and limits
-
M Steffen 2002 Analysis of Copper - possibilities and limits Erzmetall 55 366
-
(2002)
Erzmetall
, vol.55
, pp. 366
-
-
Steffen, M.1
-
24
-
-
33947485131
-
Spectrochmical analysis of oxygen-free electrolytically pure copper by a globule arc procedure
-
W E Publicover 1965 Spectrochmical analysis of oxygen-free electrolytically pure copper by a globule arc procedure Anal Chem 37 1680
-
(1965)
Anal Chem
, vol.37
, pp. 1680
-
-
Publicover, W.E.1
-
26
-
-
0038605746
-
Quantification in trace and ultratrace analyses using glow discharge techniques: Round robin test on pure copper materials
-
M Kasik C Venzago R Dorka 2003 Quantification in trace and ultratrace analyses using glow discharge techniques: round robin test on pure copper materials J Anal At Spectrom 18 603
-
(2003)
J Anal at Spectrom
, vol.18
, pp. 603
-
-
Kasik, M.1
Venzago, C.2
Dorka, R.3
-
27
-
-
33747651676
-
Application of glow discharge mass spectrometry to multielement ultra-trace determination in ultrahigh-purity copper and iron: A calibration approach achieving quantification and traceability
-
R Matschat J Hinrichs H Kipphardt 2006 Application of glow discharge mass spectrometry to multielement ultra-trace determination in ultrahigh-purity copper and iron: a calibration approach achieving quantification and traceability Anal Bioanal Chem 386 125
-
(2006)
Anal Bioanal Chem
, vol.386
, pp. 125
-
-
Matschat, R.1
Hinrichs, J.2
Kipphardt, H.3
-
29
-
-
0041706201
-
State-of-the-art in inorganic mass spectrometry for analysis of high-purity materials
-
J S Becker H J Dietze 2003 State-of-the-art in inorganic mass spectrometry for analysis of high-purity materials Int J Mass Spec 228 127
-
(2003)
Int J Mass Spec
, vol.228
, pp. 127
-
-
Becker, J.S.1
Dietze, H.J.2
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