An integrated physical model that characterizes creep and hysteresis in piezoelectric actuators

Simulation Modelling Practice and Theory

Volumn 16, Issue 1, 2008, Pages 93-110

  Yeh, T J ^a   Ruo Feng, Hung ^a   Shin Wen, Lu ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Bond graph; Creep; Feedback linearization; Hysteresis; Identification; Inverse model control; Linear programming; Modeling; Piezoelectric actuators

Indexed keywords

CREEP; FEEDBACK LINEARIZATION; HYSTERESIS; LINEAR PROGRAMMING; MATHEMATICAL MODELS;

BOND-GRAPH REPRESENTATION; DYNAMIC DAMPER; INVERSE MODEL CONTROL; NONLINEAR SPRING;

PIEZOELECTRIC ACTUATORS;

EID: 38349077117     PISSN: 1569190X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.simpat.2007.11.005     Document Type: Article

References (25)

1. Stroscio J., and Kaiser W. Scanning Tunneling Microscope (1993), Academic Press, New York
2. Moriyama S., Uchida F., and Seya E. Development of a precision diamond turning machines for fabrication of asymmetric aspheric mirrors. Opt. Eng. 7 (1988) 1008-1012
3. Ghasemi-Nejhad M.N., et al. Finite element method of active vibration suppression of smart composite structures using piezoelectric materials. J. Therm. Compos. Mater. 19 3 (2006) 309-352
4. Wong C.W., et al. Analog piezoelectric-driven tunable gratings with nanometer resolution. J. Microelectromech. Syst. 13 6 (2004) 998-1005
5. Koch M., Evans A.G.R., and Brunnschweiler A. The dynamic micropump driven with a screen printed PZT actuator. J. Micromech. Microeng. 8 (1998) 119-122
6. Tao G., and Kokotovic P.V. Adaptive control of plant with unknown hysteresis. IEEE Trans. Autom. Control 40 2 (1995) 200-212
7. Stepanenko Y., and Su C.-Y. Intelligent control of piezoelectric actuators. Proc. of the 37th IEEE Conference on Decision and Control 4 (1998) 4234-4239
8. Ge P., and Jouaneh M. Modeling hysteresis in piezoceramic actuators. Precision Eng. 17 3 (1995) 211-221
9. G.W. Galinaities, Two Methods for Modeling Scalar Hysteresis and their using in Controlling Actuators with Hysteresis, Ph.D. dissertation, Dept. Math., Blacksburg, Virginia, USA, 1999.
10. Kuhnen K., and Janocha H. Real-time compensation of hysteresis and creep in piezoelectric actuators. Sensors Actuat., Phys. A 79 (2000) 83-89
11. Goldfarb M., and Celanovic N. Modeling piezoelectric stack actuators for control of micromanipulation. IEEE Cont. Syst. Mag. 17 (1997) 69-79
12. Jung I.K.H., and Gweon D. Creep characteristics of piezoelectric actuators. Rev. Sci. Instrum. 71 4 (2000) 1896-1900
13. Wei J.C., et al. Compensation methods based on formularizing hysteresis of piezoelectric tube scanner. Rev. Sci. Instrum. 67 10 (1996) 3594-3598
14. Changhai R., and Lining S. Hysteresis and creep compensation for piezoelectric actuator in open-loop operation. Sensors Actuat. A 122 (2005) 124-130
15. Rifai O., and Youcef-Toumi K. Creep in piezoelectric scanners of atomic force microscopes. Am. Control Conference Anchorage (2002) 8-10 AK May
16. Croft D., Shed G., and Devasia S. Creep, hysteresis, and vibration compensation for piezoactuators: atomic force microscopy application. ASME J. Dyn. Syst. Measure. Control 123 (2001) 35-43
17. Richter H., et al. Modeling nonlinear behavior in a piezoelectric actuator. Precision Eng. 25 (2001) 128-137
18. Krejci P., and Kuhnen K. Inverse control of systems with hysteresis and creep. IEE Proc. - Control Theory Appl. 148 3 (2001) 185-192
19. Yeh T.-J., Lu S.-W., and Wu T.-Y. Modeling and identification of hysteresis in piezoelectric actuators. ASME J. Dyn. Syst. Measure. Control 128 2 (2006) 189-196
20. Karnopp D. Computer models of hysteresis in mechanical and magnetic components. J. Franklin Inst. 316 5 (1983) 405-415
21. Terzopoulos D., and Fleischer K. Modeling inelastic deformation: viscoelasticity, plasticity, fracture. Comput. Graph. 22 4 (1988) 269-278
22. Dahleh M.A., and Diaz-Bobillo I.J. Control of Uncertain Systems: A Linear Programming Approach (1995), Prentice-Hall
23. Song D., and Li C.J. Modeling of piezo actuator's nonlinear and frequency dependent dynamics. Mechatronics 9 4 (1999) 391-410
24. Tan X., and Baras J.S. Modeling and control of hysteresis in magnetostrictive actuators. Automatica 40 9 (2004) 1469-1480
25. Thoma J.U. Simulation by Bondgraphs (1990), Springer-Verlag