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Volumn 1180, Issue 1-2, 2008, Pages 151-158

Optimisation of a gas chromatographic method for trace gaseous impurities in nitrogen trifluoride by column sequence reversal

Author keywords

Column sequence reversal; Gas chromatography; Nitrogen trifluoride; PDHID; Pulsed discharge helium ionisation detector; Trace gas analysis

Indexed keywords

COLUMN SEQUENCE REVERSAL; NITROGEN TRIFLUORIDE; PULSED DISCHARGE HELIUM IONISATION DETECTORS; TRACE GAS ANALYSIS;

EID: 38349075038     PISSN: 00219673     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.chroma.2007.12.007     Document Type: Article
Times cited : (9)

References (19)
  • 12
    • 38349019024 scopus 로고    scopus 로고
    • M. Bullis (Director), Book of SEMI Standards, Semiconductor Equipment and Materials International, Mountain View, CA, 1996.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.