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Volumn 873, Issue 2, 2000, Pages 229-235

Gas chromatographic analysis of trace impurities in chlorine trifluoride

Author keywords

Chlorine trifluoride; Gases; Nitrogen; Oxygen

Indexed keywords

CHLORINE DERIVATIVE; NITROGEN; OXYGEN;

EID: 0034708380     PISSN: 00219673     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0021-9673(99)01294-7     Document Type: Article
Times cited : (10)

References (17)
  • 8
    • 0342853011 scopus 로고    scopus 로고
    • Department of Chemistry, University of Pretoria, personal communication
    • E.R. Rohwer, Department of Chemistry, University of Pretoria, personal communication, 1998.
    • (1998)
    • Rohwer, E.R.1
  • 14
    • 0003953226 scopus 로고
    • V. Guttman. New York: Academic Press
    • Stein L. Guttman V. Halogen Chemistry. 1967;133 Academic Press, New York.
    • (1967) Halogen Chemistry , pp. 133
    • Stein, L.1
  • 17
    • 0006191272 scopus 로고    scopus 로고
    • Mountain View, CA: Semiconductor Equipment and Materials International. (Director)
    • Bullis M. Book of SEMI Standards. 1996;Semiconductor Equipment and Materials International, Mountain View, CA. (Director).
    • (1996) Book of SEMI Standards
    • Bullis, M.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.