Microstructure and gas sensing property of porous SnO2 sputtered films

Materials Science Forum

Volumn 539-543, Issue PART 4, 2007, Pages 3508-3513

  Yamazaki, Toshinari ^a   Jin, Chengji ^a   Shen, Yanbai ^a   Kikuta, Toshio ^a   Nakatatani, Noriyuki ^a  

^a UNIVERSITY OF TOYAMA   (Japan)

Author keywords

BET method; Hydrogen; Paradium; Porosity; Sputtering; Surface area; Tin oxide

Indexed keywords

CHEMICAL SENSORS; HYDROGEN; MAGNETRON SPUTTERING; MICROSTRUCTURE; POROUS MATERIALS; SPUTTER DEPOSITION; TIN OXIDES; X RAY DIFFRACTION;

SENSOR FILMS; SPUTTERED FILMS;

OXIDE FILMS;

EID: 38349055165     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/0-87849-428-6.3508     Document Type: Conference Paper

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