Microfabrication of coupled fluid-structure systems with applications in acoustic sensing

Sensors and Actuators, A: Physical

Volumn 141, Issue 2, 2008, Pages 288-298

  White, Robert D ^a   Cheng, Lei ^b   Grosh, Karl ^b  

^a TUFTS UNIVERSITY   (United States)

^b UNIVERSITY OF MICHIGAN   (United States)

Author keywords

Acoustic; MEMS; Microfabrication; Microphone; Sensor

Indexed keywords

EQUIVALENT CIRCUITS; MATHEMATICAL MODELS; MEMS; MICROFABRICATION; MICROPHONES; MICROSENSORS; POLYSILICON; SILICON NITRIDE;

ACOUSTIC SENSING; MEMBRANE VIBRATIONS;

MICROSYSTEMS;

EID: 38149132322     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2007.08.027     Document Type: Article

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