An opto-mechatronic magnetic field microsensor

Physica Status Solidi (A) Applications and Materials Science

Volumn 204, Issue 12, 2007, Pages 4079-4082

  Chang, H C ^a   Hwang, C C ^a   Lai, C C ^a   Tseng, C L ^a  

^a FENG CHIA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC MEMBRANES; MAGNETIC FIELD STRENGTH; OPTO-MECHATRONIC MAGNETIC FIELD MICROSENSORS; SILICON-BASED MEMS COMPATIBLE TECHNOLOGIES;

FIBER BRAGG GRATINGS; MAGNETIC FIELDS; MEMS; SILICON COMPOUNDS;

MICROSENSORS;

EID: 38049116067     PISSN: 18626300     EISSN: 18626319     Source Type: Journal    
DOI: 10.1002/pssa.200777340     Document Type: Article

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