Investigation of structural stability in 4H-SiC structures with heavy ion implanted interface

Materials Science Forum

Volumn 527-529, Issue PART 1, 2006, Pages 395-398

  Galeckas, A ^a   Hallen, A ^a   Schoner A ^b   Linnros, J ^a   Pirouz, P ^c  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

^b Aereo AB   (Sweden)

^c Case Western Reserve University   (United States)

Author keywords

Antimony; Defects; Imaging spectroscopy; Implantation; Luminescence; Stacking faults

Indexed keywords

ANTIMONY; CHEMICAL VAPOR DEPOSITION; HEAVY IONS; ION IMPLANTATION; NUCLEATION; PHOTOLUMINESCENCE SPECTROSCOPY; SOLID SOLUTIONS; STACKING FAULTS;

DEFECT EVOLUTION; IMAGING SPECTROSCOPY; PHOTOLUMINESCENCE IMAGING SPECTROSCOPY; STRUCTURAL STABILITY;

SILICON CARBIDE;

EID: 37849031490     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/0-87849-425-1.395     Document Type: Conference Paper

References (7)

1. A. Galeckas, J. Linnros and M. Lindstedt: Mater. Sci. and Engineering B 102 (2003), p. 304.
2. W. Wesch, A. Heft, E. Wendler, T. Bachmann, and E. Glaser: Nucl. Instrum. Methods Phys. Res. B 96 (1995), p. 335.
3. E. Wendler, A. Heft, and W. Wesch: Nucl. Instrum. Methods Phys. Res. B 141 (1998), p. 105.
4. J.W. Peterson, G. Weyer, H.L. Nielsen, S. Damgaard, W.J. Choyke, and H. Andreasen: Hyperfine Interactions 23 (1985), p. 17.
5. O.J. Marsh and H.L. Dunlap: Rad. Effects 6 (1970), p. 301.
6. J.B. Tucker, M.V. Rao, O.W. Holland, P.H. Chi, G.C.B. Braga, J.A. Freitas Jr., and N. Papanicolaou: Diamond and Related Materials 9 (2000), p. 1887.
7. A. Galeckas, H. Kortegaard Nielsen, J. Linnros A. Hallen, B.G. Svensson and P. Pirouz: Mater. Sci. Forum Vols. 483-485 (2005), p. 327.