Diamond like carbon coatings deposited by microwave plasma CVD: XPS and ellipsometric studies

Bulletin of Materials Science

Volumn 30, Issue 6, 2007, Pages 541-546

  Dey, R M ^a   Pandey, M ^b   Bhattacharyya, D ^b   Patil, D S ^b   Kulkarni, S K ^a  

^a UNIVERSITY OF PUNE   (India)

^b BHABHA ATOMIC RESEARCH CENTRE   (India)

Author keywords

Diamond like carbon films; Microwave assisted CVD; Spectro scopic ellipsometry; X ray photoelectron spectroscopy

Indexed keywords

CHEMICAL VAPOR DEPOSITION; COATINGS; MICROWAVES; SPECTROSCOPIC ELLIPSOMETRY; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

CARBON COATINGS; MICROWAVE ASSISTED CVD; VOID PERCENTAGE;

DIAMOND LIKE CARBON FILMS;

EID: 37749033266     PISSN: 02504707     EISSN: None     Source Type: Journal    
DOI: 10.1007/s12034-007-0084-8     Document Type: Article

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