Nanostructuring of tetrahedral carbon films by carbon ion implantation

Diamond and Related Materials

Volumn 12, Issue 10-11, 2003, Pages 2051-2056

  Kutsay, O ^a   Bello, I ^a   Lifshitz, Y ^a   Lam, C W ^a   Luk, W Y ^a   Lee, S T ^a   Meng, X ^a   Kremnican, V ^a  

^a CITY UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

Ion implantation; Nanostructures; Raman spectroscopy; Tetrahedral amorphous carbon

Indexed keywords

ELECTRON DIFFRACTION; ION BOMBARDMENT; ION IMPLANTATION; RAMAN SPECTROSCOPY; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY;

ION ENERGIES;

CARBON;

CARBON;

EID: 0346119967     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(03)00220-6     Document Type: Article

References (17)

1. Aksenov I.I. Belous V.A. Padalka V.G. Khoroshikh V.M. Fiz. Plazmy 4 1978 758
2. McKenzie D.R. Muller D.A. Pailthorpe B.A. Phys. Rev. Lett. 67 1991 773
3. Lifshitz Y. Diamond Relat. Mater. 8 1999 1659
4. Berger S.D. McKenzie D.R. Martin P.J. Philos. Mag. Lett. 57 1988 285
5. McCulloch D.G. Gerstner E.G. McKenzie D.R. Prawer S. Kalish R. Phys. Rev. B 52 1995 850
6. Ziegler J.F. Biersack J.P. Littmark U. The Stopping and Range of Ions in Solids 1985 Pergamon Press New York
7. Tuinstra F. Koenig J.K. J. Chem. Phys. 53 1970 1126
8. Al-Jishi R. Dresselhaus G. Phys. Rev. B 26 1982 4514
9. Beeman D. Silverman J. Lynds R. Anderson M.R. Phys. Rev. B 30 1984 870
10. Wang C.Z. Ho K. Phys. Rev. Lett. 71 1993 1184
11. Klein M.V. Light scatterings in solids I Cardona M. Topics in Applied Physics, vol. 8 1975 147 Verlag Berlin
12. Elman B.S. Dresselhaus M.S. Dresselhaus G. Maby E.W. Mazurek H. Phys. Rev. B 24 1981 1027
13. Dillon R.O. Woollam J.A. Katkanant V. Phys. Rev. B 29 1984 3482
14. McCulloch D.G. Prawer S. Hoffman A. Phys. Rev. B 50 1994 5905
15. Prawer S. Nugent K.W. Lifshitz Y., et-al. Diamond Relat. Mater. 5 1996 433
16. Kalish R. Lifshitz Y. Nugent K. Prawer S. Appl. Phys. Lett. 74 1999 2936
17. Prawer S. Ninio F. Bianchonette I. J. Appl. Phys. 68 1990 2361