Crystallinity evaluation by microwave photoconductivity decay in double-layered polycrystalline silicon thin films crystallized by solid green laser annealing

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 46, Issue 12, 2007, Pages 7607-7611

  Sugawara, Yuta ^a   Uraoka, Yukiharu ^a   Yano, Hiroshi ^a   Hatayama, Tomoaki ^a   Fuyuki, Takashi ^a   Mimura, Akio ^b  

^a NARA INSTITUTE OF SCIENCE AND TECHNOLOGY   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Crystallization; Green laser; Low temperature poly Si; Thin film transistor

Indexed keywords

ANNEALING; CHARGE CARRIERS; CRYSTALLIZATION; PHOTOCONDUCTIVITY; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING SILICON;

CRYSTALLINITY; GREEN LASER; PHOTOEXCITED CARRIERS;

THIN FILMS;

EID: 37549012159     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.46.7607     Document Type: Article

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