Further investigation on the formation mechanisms of (NH 4 ) 2 SiF 6 synthesized by dry etching technique

Applied Surface Science

Volumn 254, Issue 6, 2008, Pages 1870-1873

  Kabacelik, I ^a   Ulug, B ^a  

^a AKDENIZ UNIVERSITY   (Turkey)

Author keywords

Ammonium silicofluoride; Dry etching; FTIR; Hydrofluosilicic acid; Oxygen; Porous silicon

Indexed keywords

AMMONIUM COMPOUNDS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; INFRARED ABSORPTION; OXYGEN; POROUS SILICON; SYNTHESIS (CHEMICAL);

ACID MIXTURE; SILICON SURFACE;

DRY ETCHING;

EID: 37349104697     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2007.08.064     Document Type: Article

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