Possible low-k solution and other potential applications

European Semiconductor

Volumn 26, Issue 7, 2004, Pages 31-34

  Kalem, Seref ^a,b  

^a Turkey's Natl Inst Electron/C   (Turkey)

^b SCIENTIFIC AND TECHNOLOGICAL RESEARCH COUNCIL OF TURKEY   (Turkey)

Author keywords

[No Author keywords available]

Indexed keywords

BUFFERS; CRYPTOCRYSTALLINE MATERIALS; LATTICE MISMATCHES; SPIN-ON TECHNOLOGY;

CHEMICAL VAPOR DEPOSITION; COST EFFECTIVENESS; CRYPTOGRAPHY; CRYSTAL LATTICES; ELECTRIC CONTACTS; ETCHING; MOLECULAR BEAM EPITAXY; PERMITTIVITY; RELIABILITY; SILICON WAFERS; VAPORS;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 3142732752     PISSN: 02656027     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (0)