Fabrication of autocloned photonic crystals using electron-beam guns with ion-assisted deposition

Thin Solid Films

Volumn 516, Issue 6, 2008, Pages 1051-1055

  Chang, Te Hung ^a   Chen, Sheng Hui ^a   Lee, Cheng Chung ^a   Chen, Husen Li ^b  

^a NATIONAL CENTRAL UNIVERSITY   (Taiwan)

^b NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

Autocloning; Ion etching; Ion assisted deposition; Photonic crystal; Scanning electron microscopy; Thin film

Indexed keywords

DEPOSITION; ELECTRON BEAMS; SCANNING ELECTRON MICROSCOPY; SPUTTER DEPOSITION; TEMPERATURE MEASUREMENT; THIN FILMS;

AUTOCLONED PHOTONIC CRYSTALS; ION ASSISTED DEPOSITIONS; ION ETCHINGS; SURFACE CORRUGATION;

PHOTONIC CRYSTALS;

EID: 37349052853     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.05.072     Document Type: Article

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