Aluminium implantation of p-SiC for ohmic contacts

Diamond and Related Materials

Volumn 6, Issue 10, 1997, Pages 1414-1419

  Spiess L ^a   Nennewitz, O ^a   Weishart, H ^b   Lindner, J ^c   Skorupa, W ^b   Romanus, H ^a   Erler, F ^a   Pezoldt, J ^a  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

^b INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

^c UNIVERSITY OF AUGSBURG   (Germany)

Author keywords

Atomic force microscopy; Metallization; Ohmic contact; Transmission electron microscopy

Indexed keywords

EID: 0039127922     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(97)00047-2     Document Type: Article

References (2)

1. L.M. Porter, R.F. Davis, Mater. Sci. Engng B34 (1995) 83-105.
2. L. Spieß, O. Nennewitz, J. Pezoldt, Inst. Phys. Conf. Ser. 142 (1996) 585-588.