High throughput defect detection with multiple parallel electron beams

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 25, Issue 6, 2007, Pages 2521-2525

  Van Himbergen, H M P ^a   Nijkerk, M D ^a   De Jager, P W H ^a   Hosman, T C ^b   Kruit, P ^b  

^a TNO   (Netherlands)

^b DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

CROSSTALK; ELECTRON BEAMS; PHOSPHORS;

DEFECT DETECTION SYSTEMS; DETECTION ARRAY; LIGHT OPTICS; MICROCOLUMN; PROJECTION LENS;

DEFECTS;

EID: 37149029686     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2789449     Document Type: Article

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