Design and fabrication of a nanofluidic channel by selective thermal oxidation and etching back of silicon dioxide made on a silicon substrate

Journal of Micromechanics and Microengineering

Volumn 17, Issue 12, 2007, Pages 2393-2397

  Wu, Changju ^a   Jin, Zhonghe ^a   Wang, Huiquan ^a   Ma, Huilian ^a   Wang, Yuelin ^a  

^a ZHEJIANG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

NANOFLUIDICS; OXIDATION; SCANNING ELECTRON MICROSCOPY; SODIUM CHLORIDE; SOLUTIONS;

CAPILLARY PHENOMENON; NANOCHANNELS;

SILICA;

EID: 36949018390     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/12/001     Document Type: Article

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