Estimation of moisture barrier ability of thin SiNx single layer on polymer substrates prepared by Cat-CVD method

Thin Solid Films

Volumn 516, Issue 5, 2008, Pages 607-610

  Saitoh, K ^a   Kumar, R S ^b   Chua, S ^b   Masuda, A ^c   Matsumura, H ^c  

^a Material Science Laboratory   (Japan)

^b INSTITUTE OF MATERIALS RESEARCH AND ENGINEERING   (Singapore)

^c JAPAN ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY   (Japan)

Author keywords

Cat CVD; Gas barrier film

Indexed keywords

CHEMICAL VAPOR DEPOSITION; COPOLYMERS; FILM THICKNESS; MOISTURE; OLEFINS; POLYETHYLENE TEREPHTHALATES;

GAS BARRIER FILMS; MOISTURE BARRIERS; MOISTURE PERMEATION;

SILICON COMPOUNDS;

EID: 36849076821     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.06.215     Document Type: Article

References (5)

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