SU-8 guiding layer for love wave devices

Sensors

Volumn 7, Issue 11, 2007, Pages 2539-2547

  Roach, Paul ^a   Atherton, Shaun ^a   Doy, Nicola ^a   McHale, Glen ^a   Newton, Michael I ^a  

^a NOTTINGHAM TRENT UNIVERSITY   (United Kingdom)

Author keywords

Love wave; SH SAW; SU 8; SU 8 guiding layer

Indexed keywords

FABRICATION; PHOTORESISTS; PROTEINS;

FREQUENCY DEPENDENCE; GUIDING LAYER; HIGH ASPECT RATIO STRUCTURES; LOVE WAVE; LOVE WAVE SENSORS; PHYSICAL ADSORPTION; SU-8; WATER-GLYCEROL MIXTURES;

ASPECT RATIO;

EID: 36849068797     PISSN: 14243210     EISSN: 14248220     Source Type: Journal    
DOI: 10.3390/s7112539     Document Type: Article

References (22)

1. Thompson, M.; Stone, D. Surface Launched Acoustic Wave Sensors: Chemical Sensing and Thin Film Applications, John Wiley and Sons: New York, 1997.
2. Lucklum, R.; Hauptmann, P. Acoustic Microsensors - The Challenge Behind Microgravimetry. Anal. Bioanal. Chem. 2006, 384(3), 667-682.
3. McHale, G.; Generalized Concept of Shear Horizontal Acoustic Plate Mode and Love Wave Sensors. Meas. Sci. Technol. 2003, 14, 1847-1853.
4. Melzak, K.A.; Ellar, D.J.; Gizeli, E. Interaction of Cytolytic Toxin CytB with a Supported Lipid Bilayer: Study Using an Acoustic Wave Device. Langmuir 2004, 20(4), 1386-1392.
5. Schlensog, M.D.; Gronewold, T.M.A.; Tewes, M.; Famulok, M.; Quandt, E. A Love-Wave Biosensor Using Nucleic Acids as Ligands. Sens. Actuators B 2004, 101(3), 308-315.
6. Melzak, K.A.; Martin, F.; Newton, M.I.; McHale, G.; Gizeli, E. Acoustic Determination of Polymer Molecular Weights and Rotation Times. J. Polymer Sci. B 2002, 40(14), 1490-1495.
7. Turton, A.; Bhattacharyya, D.; Wood, D. Liquid Density Analysis of Sucrose and Alcoholic Beverages using polyimide Guided Love-mode Acoustic Wave Sensors. Meas. Sci Technol. 2006, 17, 257-263.
8. Razan, F.; Rebiere, D.; Dejous, C.; Monin, D.; Joanicot, M.; Conedera, V. Determination of Menthol Kinetic Constants with Love-Wave Device. Sens. Actuators B 2006, 118(1-2), 368-373.
9. Gizeli, E.; Lowe, C.R.; Liley, M.; Vogel, H. Detection of Supported Lipid Layers With the Acoustic Love Waveguide Device: Application to Biosensors. Sens. Actuators B 1996, 34, 295-300.
10. Harding, L.G.; Du, J. Design and Properties of Quartz-Based Love Wave Acoustic Sensors Incorporating Silicon Dioxide and PMMA Guiding Layers. Smart Mater. Struct. 1997, 6, 716-720.
11. Newton, M.I.; McHale, G.; Martin, F. Experimental Study of Love Wave Devices With Thick Guiding Layers. Sens. Actuators A 2004, 109, 180-185.
12. Jakoby, B.; Ismael, G.M.; Byfiled, M.P.; Vellekoop, M.J. A Novel Molecularly Imprinted Thin Film Applied to a Love Wave Gas Sensor. Sens. Actuators A 1999, 76, 93-97.
13. Du, J.; Harding, L.G. A Multilayer Structure for Love-Mode Acoustic. Sens. Actuators A 1998, 65, 152-159
14. Du, J.; Harding, G.L.; Ogilvy, J.A.; Dencher, P.R.; Lake, M. A Study of Love-Wave Acoustic Sensors. Sens. Actuators A 1996, 56, 211-219.
15. Arana, N.; Puente, D.; Ayerdi, I.; Castano, E.; Berganzo, J. SU8 Protective Layers in Liquid Operating SAWs. Sens. Actuators B 2006, 118, 374-379.
16. LaBianca, N.; Gelorme, J.D. High aspect ratio resist for thick film applications. Proc. SPIE, 1995, 2438, 846-852
17. McHale, G.; Newton, M.I.; Martin, F. Theoretical Mass, Liquid, and Polymer Sensitivity of Acoustic Wave Sensors With Viscoelastic Guiding Layers. J. Appl. Phys. 2003, 93(1), 675-690.
18. Sauerbrey, G. The Use of Quartz Oscillators for Weighing Thin Layers and for Microweighing. Z. Phys. 1959, 155, 206-222.
19. Kanazawa, K.K.; Gordon, J.G. The Oscillation Frequency of a Quartz Resonator in Contact With a Liquid. Anal. Chim. Acta. 1985, 175, 99-105.
20. Hossenlopp, J.; Jiang, L.; Cernosek, R.; Josse, F. Characterisation of Epoxy Resin (SU-8) Film Using Thickness-Shear Mode (TSM) Resonator Under Various Conditions. J. Polymer Sci. B 2004, 42, 2373-2384.
21. Roach, P.; Farrar, D.; Perry, C.C. Interpretation of Protein Adsorption: Surface-Induced Conformational Changes. J Am. Chem. Soc. 2005, 127, 8168-8173.
22. Shirtcliffe, N.J.; Aqil, S.; Evans, C.; McHale, G.; Newton, M.I.; Perry, C.C.; Roach, P. The use of high aspect ratio photoresist (SU-8) for super-hydrophobic pattern prototyping. J. Micromech. Microeng. 2004, 14, 1384-1389.