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Volumn 938, Issue , 2007, Pages 237-244
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Electron, ion and atom collisions leading to anomalous doppler broadening in hydrogen
a a a |
Author keywords
Dissociative excitation; Doppler shift; Fast neutrals; Low current Townsend discharge; Plasma etching
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Indexed keywords
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EID: 36849018908
PISSN: 0094243X
EISSN: 15517616
Source Type: Conference Proceeding
DOI: 10.1063/1.2800136 Document Type: Conference Paper |
Times cited : (4)
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References (26)
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