A new method for the calibration of the vertical scale of a stylus profilometer using multiple delta-layer films

Measurement Science and Technology

Volumn 18, Issue 9, 2007, Pages 2750-2754

  Kim, Kyung Joong ^a   Jung, Chil Seong ^b   Hong, Tae Eun ^c  

^a Korea Research Institute of Standards and Science   (South Korea)

^b Hynix Semiconductor Inc   (South Korea)

^c Korea Basic Science Institute (KBSI)   (South Korea)

Author keywords

Multiple delta layer; Scale calibration; SIMS; Step height; Stylus profilometer

Indexed keywords

CALIBRATION; ION BEAMS; SECONDARY ION MASS SPECTROMETRY; TRANSMISSION ELECTRON MICROSCOPY;

ION BEAM SPUTTERING; MULTIPLE DELTA-LAYER; SCALE CALIBRATION; STEP HEIGHT; STYLUS PROFILOMETER;

MEASUREMENT THEORY;

CALIBRATION; ION BEAMS; MEASUREMENT THEORY; SECONDARY ION MASS SPECTROMETRY; TRANSMISSION ELECTRON MICROSCOPY;

EID: 36448951247     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/18/9/002     Document Type: Article

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