M3-modular multi-scale assembly system for MEMS packaging

IEEE International Conference on Intelligent Robots and Systems

Volumn , Issue , 2006, Pages 3712-3717

  Popa, Dan ^a   Murthy, Rakesh ^a   Mittal, Manoj ^b   Sin, Jeongsik ^a   Stephanou, Harry ^a  

^a UNIVERSITY OF TEXAS AT ARLINGTON   (United States)

^b Bennington Microtechnology Center   (United States)

Author keywords

Assembly; MEMS; Multi scale; Packaging; Robotics

Indexed keywords

ELECTRONICS PACKAGING; INVERSE KINEMATICS; MEMS; MODULAR ROBOTS; ROBOTICS; VIBRATION CONTROL; VISUAL SERVOING;

KINEMATIC IDENTIFICATION; MEMS PACKAGING; PRECISION ROBOTS;

ROBOTIC ASSEMBLY;

EID: 34250614597     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IROS.2006.281751     Document Type: Conference Paper

References (11)

1. D.O. Popa, B.H. Kang, J. Sin, "Reconfigurable Microassembly System for Photonics Applications," in Proc. IEEE Conf. on Robotics and Automation, Washington, D.C., 2002.
2. A.A. Rizzi, J. Gowdy, R.L. Hollis, "Agile assembly architecture: an agent based approach to modular precision assembly systems," in Proc. of 1997 IEEE International Conference on Robotics and Automation, Volume:2, 20-25 April 1997, pp 1511-1516.
3. T. Fukuda, F. Arai, L. Dong, "Nano Robotic World - From Micro to Nano," in Proc. IEEE Conf. On Robotics and Automation (ICRA '01), Seoul, Korea, 2001.
4. S. Fatikow, J. Seyfriedl, St. Fahlbuschl, A. Buerklel and F. Schmoeckell, "A Flexible Microrobot-Based Microassembly Station," in Journal of Intelligent and Robotic Systems, Vol 27, No. 1-2, January 2000.
5. K. Goldberg, K.F. Bohringer, R. Fearing, "MicroAssembly," in Handbook of Industrial Robotics, 2nd Edition, edited by S. Nof. John Wiley and Sons, 1999, pp 1045-1066.
6. R. S. Fearing, "Survey of Sticking Effects for Microparts Handling", Proceedings of the IEEE/RJS International Conference on Intelligent Robots and Systems, 1995.
7. D.O.Popa, H.Stephanou, "Micro and Meso Scale Robotic Assembly", in SME Journal of Manufacturing Processes, Vol. 6, No. 1, 2004, 52-71.
8. D.O.Popa, M.Deeds, et. al., "Automatic Assembly and Hermetic Packaging of MOEMS for Applications requiring extended shelf lives", in Proc. of ASME IMECE, Nov 5-11, 2005.
9. Brad Nelson et.,al., "Visual Servoing for Robotic Assembly", in Visual Servoing- Real-Time Control of Robot Manipulators Based on Visual Sensory Feedback, ed. K.Hashimoto, World Scientific Publishing Co. Pte. Ltd., River Edge, NJ, pp. 139-164, 1993.
10. S.J. Ralis, B. Vikramaditya, B. J. Nelson, "Micropositioning of a Weakly Calibrated Microassembly System Using Coarse-to-Fine Visual Servoing Strategies," in IEEE Transactions on Electronics Packaging Manufacturing, Vol 23, No.2, April 2000
11. R. M. Murray, Z.Li, S. S. Sastry, "Mathematical Introduction to Robotic Manipulation," CRC Press, 1994.