Analysis of surface and material modifications caused by laser drilling of AlN ceramics

Applied Surface Science

Volumn 254, Issue 4, 2007, Pages 893-897

  Nedialkov, N ^a   Sawczak, M ^b   Jendrzejewski, R ^b   Atanasov, P ^a   Martin, M ^c   Sliwinski G ^b  

^a INSTITUTE OF ELECTRONICS   (Bulgaria)

^b POLISH ACADEMY OF SCIENCES   (Poland)

^c INSTITUTO DE QUÍMICA FÍSICA ROCASOLANO   (Spain)

Author keywords

AlN ceramics; Laser drilling; Numerical simulations

Indexed keywords

ALUMINUM COMPOUNDS; DRILLING; HEAT AFFECTED ZONE; IRRADIATION; LASER APPLICATIONS; SPECTRUM ANALYSIS;

ALN CERAMICS; GASEOUS NITROGEN; LASER DRILLING;

CERAMIC MATERIALS;

EID: 36349011505     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2007.07.151     Document Type: Article

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