Patterning of phase change films with microlens arrays

Journal of Alloys and Compounds

Volumn 449, Issue 1-2, 2008, Pages 253-257

  Lin, Y ^a,b   Hong, M H ^a,b   Chen, G X ^a   Lim, C S ^a   Wang, Z B ^b   Tan, L S ^a   Shi, L P ^b   Chong, T C ^a,b  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b DATA STORAGE INSTITUTE   (Singapore)

Author keywords

Atomic force microscopy; Microlens array; Near field scanning optical microscopy; Phase change

Indexed keywords

ATOMIC FORCE MICROSCOPY; GERMANIUM COMPOUNDS; MICROLENSES; NEAR FIELD SCANNING OPTICAL MICROSCOPY; OPTICAL PROPERTIES; PHASE CHANGE MATERIALS;

LASER FLUENCE; MICROLENS ARRAYS; NANOMETERS; PHASE CHANGE FILMS;

THIN FILMS;

EID: 36348989666     PISSN: 09258388     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jallcom.2006.02.111     Document Type: Article

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