Atomic-level simulations of nanoindentation-induced phase transformation in mono-crystalline silicon

Applied Surface Science

Volumn 254, Issue 5, 2007, Pages 1415-1422

  Lin, Yen Hung ^a   Chen, Tei Chen ^a   Yang, Ping Feng ^b   Jian, Sheng Rui ^c   Lai, Yi Shao ^b  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^b ADVANCED SEMICONDUCTOR ENGINEERING INC   (Taiwan)

^c I SHOU UNIVERSITY   (Taiwan)

Author keywords

Molecular dynamics simulations; Nanoindentation; Phase transformation; Silicon; Si

Indexed keywords

CARRIER MOBILITY; MICROPROCESSOR CHIPS; NANOINDENTATION; PHASE TRANSITIONS; SILICON;

COORDINATE NUMBERS; DIAMOND CUBIC STRUCTURE; DIAMOND INDENTER; MORSE POTENTIAL;

MOLECULAR DYNAMICS;

EID: 36348965809     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2007.06.071     Document Type: Article

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