Crystallisation of TiO 2 thin films induced by excimer laser irradiation

Applied Surface Science

Volumn 254, Issue 4, 2007, Pages 971-974

  Van Overschelde, O ^a   Snyders, R ^b   Wautelet, M ^a  

^a UNIVERSITY OF MONS   (Belgium)

^b RWTH AACHEN UNIVERSITY   (Germany)

Author keywords

Anatase; Excimer; Thin films; TiO 2

Indexed keywords

CRYSTALLIZATION; EXCIMER LASERS; LASER BEAM EFFECTS; MAGNETRON SPUTTERING; MICROSTRUCTURE; PROFILOMETRY; SCANNING ELECTRON MICROSCOPY; TITANIUM DIOXIDE; ULTRAVIOLET RADIATION; X RAY DIFFRACTION;

NANOSCALE FEATURES; PHYSICO-CHEMICAL MECHANISMS; REACTIVE MAGNETRON SPUTTERING;

THIN FILMS;

EID: 36249001650     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2007.08.018     Document Type: Article

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