Excimer laser ablation of thin titanium oxide films on glass

Applied Surface Science

Volumn 252, Issue 13 SPEC. ISS., 2006, Pages 4722-4727

  Van Overschelde, O ^a   Dinu, S ^b   Guisbiers, G ^a   Monteverde, F ^c   Nouvellon, C ^c   Wautelet, M ^a  

^a UNIVERSITY OF MONS   (Belgium)

^b VALAHIA UNIVERSITY OF TARGOVISTE   (Romania)

^c MATERIA NOVA RESEARCH CENTER   (Belgium)

Author keywords

Glass substrates; Laser ablation; Laser processing; Magnetron sputter deposition; Thin films; Titanium dioxide films

Indexed keywords

EXCIMER LASERS; GLASS; LASER ABLATION; LASER PULSES; MAGNETRON SPUTTERING; THERMAL EFFECTS; THIN FILMS;

GLASS SUBSTRATES; LASER PROCESSING; MAGNETRON SPUTTER DEPOSITIONS; TITANIUM DIOXIDE FILMS;

TITANIUM OXIDES;

EID: 33646718556     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2005.07.147     Document Type: Article

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