Controlled process for polymer micromachining using designed pulse trains of a UV solid state laser

Applied Surface Science

Volumn 254, Issue 4, 2007, Pages 845-849

  Ilie, Diana ^a   Mullan, Claire ^a   O'Connor, Gerard M ^a   Flaherty, Tony ^a   Glynn, Thomas J ^a  

^a NATIONAL UNIVERSITY OF IRELAND   (Ireland)

Author keywords

Breakthrough sensor; Micromachining; Polymer; Pulse picker; UV solid state laser

Indexed keywords

MICROMACHINING; POLYCARBONATES; SOLID STATE LASERS; THERMAL EFFECTS; WAVELENGTH;

BREAKTHROUGH SENSOR; CONTROLLED PROCESS; PULSE PICKER;

POLYMERS;

EID: 36248984249     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2007.08.021     Document Type: Article

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