New depth-setting standards with grooves up to 5 mm depth

Proceedings of the 6th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2006

Volumn 1, Issue , 2006, Pages 442-445

  Brand, U ^a   Schnadelbach H ^a   Schodel R ^a   Feist, C ^a   Hinzmann, G ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; PRECISION ENGINEERING;

COMPARISON MEASUREMENT; GROOVE DEPTH; HIGH-PRECISION; HIGH-QUALITY DIAMONDS; MEASURING INSTRUMENTS; STYLUS INSTRUMENT; THREE-WAVELENGTHS;

STANDARDS;

EID: 84908303133     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (1)

1. Brand, U; Kleine-Besten, T; Schwenke, H: Development of a special CMM for dimensional metrology on microsystem components. ASPE Conf. in Scottsdale, Arizona, 22th-27th Oct. 2000, 542-546