Nanoscale thick layer transfer of hydrogen-implanted wafer by using polycrystalline silicon sacrificial layer

Applied Physics Letters

Volumn 91, Issue 20, 2007, Pages

  Lee, T H ^a   Huang, C H ^a   Yang, Y Y ^a   Suryasindhu, T ^a   Li, P W ^a  

^a NATIONAL CENTRAL UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

FILM THICKNESS; POLYSILICON; SILICON ON INSULATOR TECHNOLOGY; THIN FILMS;

NANOSCALE THICK LAYER TRANSFER; POLYCRYSTALLINE SILICON SACRIFICIAL LAYERS;

HYDROGEN;

EID: 36248958040     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2806913     Document Type: Article

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